JPS5538046B2 - - Google Patents
Info
- Publication number
- JPS5538046B2 JPS5538046B2 JP15580176A JP15580176A JPS5538046B2 JP S5538046 B2 JPS5538046 B2 JP S5538046B2 JP 15580176 A JP15580176 A JP 15580176A JP 15580176 A JP15580176 A JP 15580176A JP S5538046 B2 JPS5538046 B2 JP S5538046B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15580176A JPS5377465A (en) | 1976-12-20 | 1976-12-20 | Boron deposition method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15580176A JPS5377465A (en) | 1976-12-20 | 1976-12-20 | Boron deposition method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5377465A JPS5377465A (en) | 1978-07-08 |
| JPS5538046B2 true JPS5538046B2 (en]) | 1980-10-02 |
Family
ID=15613733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15580176A Granted JPS5377465A (en) | 1976-12-20 | 1976-12-20 | Boron deposition method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5377465A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56169322A (en) * | 1980-05-30 | 1981-12-26 | Fujikura Ltd | Selective diffusion of boron into silicon |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4847769A (en]) * | 1971-10-18 | 1973-07-06 |
-
1976
- 1976-12-20 JP JP15580176A patent/JPS5377465A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5377465A (en) | 1978-07-08 |